www.wiley.com/go/meoa
Series Editors
Professor Arthur Willoughby, University of Southampton, Southampton, UK
Dr Peter Capper, Ex‐Leonardo MW Ltd, Southampton, UK
Professor Safa Kasap, University of Saskatchewan, Saskatoon, Canada
Published Titles
Bulk Crystal Growth of Electronic, Optical and Optoelectronic Materials, Edited by P. Capper Properties of Group‐IV. III–V and II–VI Semiconductors, S. Adachi
Charge Transport in Disordered Solids with Applications in Electronics, Edited by S. Baranovski
Optical Properties of Condensed Matter and Applications, Edited by J. Singh
Thin Film Solar Cells: Fabrication, Characterization, and Applications, Edited by J. Poortmans and V. Arkhipov
Dielectric Films for Advanced Microelectronics, Edited by M. R. Baklanov, M. Green, and K. Maex
Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials, Edited by P. Capper and M. Mauk
Molecular Electronics: From Principles to Practice, M. Petty
Luminescent Materials and Applications, A. Kitai
CVD Diamond for Electronic Devices and Sensors, Edited by R. S. Sussmann
Properties of Semiconductor Alloys: Group IV, III–V, and II–VI Semiconductors, S. Adachi
Mercury Cadmium Telluride, Edited by P. Capper and J. Garland
Zinc Oxide Materials for Electronic and Optoelectronic Device Applications, Edited by C. Litton, D. C. Reynolds, and T. C. Collins
Lead‐Free Solders: Materials Reliability for Electronics, Edited by K. N. Subramanian
Silicon Photonics: Fundamentals and Devices, M. Jamal Deen and P. K. Basu
Nanostructured and Subwavelength Waveguides: Fundamentals and Applications, M. Skorobogatiy
Photovoltaic Materials: From Crystalline Silicon to Third‐Generation Approaches, Edited by G. Conibeer and A. Willoughby
Glancing Angle Deposition of Thin Films: Engineering the Nanoscale, Matthew M. Hawkeye, Michael T. Taschuk, and Michael J. Brett
Physical Properties of High‐Temperature Superconductors, R. Wesche
Spintronics for Next Generation Innovative Devices, Edited by Katsuaki Sato and Eiji Saitoh
Inorganic Glasses for Photonics: Fundamentals, Engineering and Applications, Animesh Jha
Amorphous Semiconductors: Structural, Optical and Electronic Properties, Kazuo Morigaki, Sandor Kugler and Koichi Shimakawa
Microwave Materials and Applications 2 Vol sel, Edited by Mailadil T. Sebastian, Rick Ubic, and Heli Jantunen
Molecular Beam Epitaxy: Materials and Applications for Electronics and Optoelectronics, Edited by Hajime Asahi and Yoshiji Korikoshi
Edited by
STUART IRVINE
Centre for Solar Energy Research, College of Engineering,
Swansea University, OpTIC Centre, St. Asaph, UK
PETER CAPPER
Ex‐Leonardo MW Ltd, Southampton, UK
This edition first published 2020
© 2020 John Wiley & Sons Ltd
All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted, in any form or by any means, electronic, mechanical, photocopying, recording or otherwise, except as permitted by law. Advice on how to obtain permission to reuse material from this title is available at http://www.wiley.com/go/permissions.
The right of Stuart Irvine and Peter Capper to be identified as the authors of the editorial material in this work has been asserted in accordance with law.
Registered Offices
John Wiley & Sons, Inc., 111 River Street, Hoboken, NJ 07030, USA
John Wiley & Sons Ltd, The Atrium, Southern Gate, Chichester, West Sussex, PO19 8SQ, UK
Editorial Office
The Atrium, Southern Gate, Chichester, West Sussex, PO19 8SQ, UK
For details of our global editorial offices, customer services, and more information about Wiley products visit us at www.wiley.com.
Wiley also publishes its books in a variety of electronic formats and by print‐on‐demand. Some content that appears in standard print versions of this book may not be available in other formats.
Limit of Liability/Disclaimer of Warranty
In view of ongoing research, equipment modifications, changes in governmental regulations, and the constant flow of information relating to the use of experimental reagents, equipment, and devices, the reader is urged to review and evaluate the information provided in the package insert or instructions for each chemical, piece of equipment, reagent, or device for, among other things, any changes in the instructions or indication of usage and for added warnings and precautions. While the publisher and authors have used their best efforts in preparing this work, they make no representations or warranties with respect to the accuracy or completeness of the contents of this work and specifically disclaim all warranties, including without limitation any implied warranties of merchantability or fitness for a particular purpose. No warranty may be created or extended by sales representatives, written sales materials or promotional statements for this work. The fact that an organization, website, or product is referred to in this work as a citation and/or potential source of further information does not mean that the publisher and authors endorse the information or services the organization, website, or product may provide or recommendations it may make. This work is sold with the understanding that the publisher is not engaged in rendering professional services. The advice and strategies contained herein may not be suitable for your situation. You should consult with a specialist where appropriate. Further, readers should be aware that websites listed in this work may have changed or disappeared between when this work was written and when it is read. Neither the publisher nor authors shall be liable for any loss of profit or any other commercial damages, including but not limited to special, incidental, consequential, or other damages.
Library of Congress Cataloging‐in‐Publication Data
Names: Irvine, Stuart, editor. | Capper, Peter, editor.
Title: Metalorganic vapor phase epitaxy (MOVPE) : growth, materials properties, and applications / edited by Stuart Irvine and Peter Capper.
Description: First edition. | Hoboken, NJ : John Wiley & Sons, Inc., 2020. |
Series: Wiley series in materials for electronic & optoelectronic applications ; 7593 | Includes bibliographical references and index. |
Identifiers: LCCN 2019017934 (print) | LCCN 2019019971 (ebook) | ISBN 9781119313045 (Adobe PDF) | ISBN 9781119313038 (ePub) | ISBN 9781119313014 (hardback)
Subjects: LCSH: Metal organic chemical vapor deposition.
Classification: LCC TS695 (ebook) | LCC TS695 .M478 2020 (print) | DDC 621.3815/2–dc23
LC record available at https://lccn.loc.gov/2019017934
Cover Design: Dan Jubb
Cover Image: © molekuul_be/Shutterstock
S.J.C.I. – This book is dedicated to my wife Fiona and our family for their patience and support in completing this project at a difficult time for our family. I also commit this book to the memory of Primrose.
P.C. – This book is dedicated to my wife Marian and our sons Samuel and Thomas for all their love and support. I also wish to dedicate it to the memory of my brother Ken.
I.M. Baker Leonardo MW Ltd, Southampton, UK
P. Capper Ex‐Leonardo MW Ltd, Southampton, UK
A. Dadgar Otto‐von‐Guericke Universität Magdeburg, Germany
T. Detchprohm Georgia Institute of Technology, School of Electrical and Computer Engineering, Atlanta, USA
R.D. Dupuis Georgia Institute of Technology, School of Electrical and Computing Engineering, Atlanta, USA
C.M. Fetzer Boeing‐Spectrolab, Sylmar, California, USA
H. Hardtdegen Ernst Ruska‐Centre, Forschungszentrum Jülich GmbH, Germany
A. Hospodková Department of Semiconductors, Institute of Physics, Czech Academy of Sciences, Prague, Czech Republic
E. Hulicius Department of Semiconductors, Institute of Physics, Czech Academy of Sciences, Prague, Czech Republic
S.J.C. Irvine Centre for Solar Energy Research, College of Engineering, Swansea University, OpTIC Centre, St. Asaph, UK
H.J. Joyce Department of Engineering, Cambridge University, UK
N.H. Karam Karamco USA Inc., La Cañada, California, USA
G. Kartopu Centre for Solar Energy Research, College of Engineering, Swansea University, OpTIC Centre, St. Asaph, UK
B. Kunert imec, Leuven, Belgium
X. Li Electrical Engineering Program, Computer, Electrical, Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal, Makkah, Saudi Arabia
X.‐Q. Liu Boeing‐Spectrolab, Sylmar, California, USA
W. Lundin Ioffe Institute, Russia
C.D. Maxey Leonardo MW Ltd, Southampton, UK
M. Mikulics Peter Grünberg Institute, Forschungszentrum Jülich GmbH, Germany
V. Muñoz‐Sanjosé Dpto. Física Aplicada y Electromagnetismo, University of Valencia, Spain
D. Nelson IQEP, Cardiff, Wales
J.‐H. Ryou Department of Mechanical Engineering, The University of Houston, Texas, USA
K.L. Schulte National Renewable Energy Laboratory, Golden, Colorado, USA
D.V. Shenai‐Khatkhate Electronics & Imaging, DuPont de Nemours, Inc., Marlborough, Massachusetts, USA
(Formerly known as Dow Electronic Materials, Rohm and Haas Company, and Morton Metalorganics)
M.A. Steiner National Renewable Energy Laboratory, Golden, Colorado, USA
G.B. Stringfellow The University of Utah, Salt Lake City, USA
R. Talalaev STR Group Ltd, Russia
K. Volz Material Sciences Center and Faculty of Physics, Philipps‐Universität Marburg, Germany
M. Weyers Ferdinand‐Braun‐Institute, Leibniz‐Institut für Höchstfrequenztechnik, Berlin, Germany
M. Zíková Department of Semiconductors, Institute of Physics, Czech Academy of Sciences, Prague, Czech Republic
It gives me immense pleasure to introduce this book on the technology of Metalorganic Vapor Phase Epitaxy (MOVPE), edited by Stuart Irvine and Peter Capper, and published by John Wiley. It is one of the most comprehensive books to have ever been published on the subject and will serve to educate, inform, train, and inspire a new generation of engineers and scientists of many disciplines who become involved in the semiconductor industry in the coming years and decades ahead.
The publication of such a comprehensive collection of chapters, covering the growth, materials properties, and applications enabled by MOVPE, and written by subject‐matter experts, could not be more timely. It is no exaggeration to say that MOVPE has changed the world we all live in and the way we work, live, and play.
The entire global communications network, from the devices that provide the light signalling, switching, and detection in high‐speed fiber optic systems and the optical infrastructure for dramatically increasing the information‐handling capacity of todays' data centers, to the critical radio frequency (RF) components in handsets, base stations, and satellites that enable mobile communications in all its forms, would not be practically possible without MOVPE technology providing the manufacturing of the fundamental materials structures from which the key devices are made. Without MOVPE, we would have no high‐speed broadband, no internet as we know it, no global mobile communications as we know it.
MOVPE has enabled a global lighting revolution to take place over the last two decades, in the form of light‐emitting diodes (LEDs), which save enormous amounts of energy every year because they are up to 10 times more efficient at converting electrical energy into light energy than conventional incandescent light bulbs. Lighting accounts for around one‐third of all energy use on our planet, so the replacement of incandescent bulbs with LED equivalents is cutting down carbon emissions enormously by reducing the need for power stations. LEDs are also being used to transform whole industries. From the way in which retailers use light to promote their products – be they clothing, cars, or perishable foods – to the advent of hydroponic and vertical farming to grow plants more efficiently and closer to the point of use, thereby reducing transport needs, are all contributing to carbon‐emission reduction on our planet. The increasing production of electric vehicles is reliant upon materials made by MOVPE, as are the new wave of power‐efficient devices used for a myriad of electrical switching applications such as mobile phone chargers, motors, inverters for solar farms, and a host of other energy‐hungry applications.
All satellites launched today are powered in space by highly efficient solar cells made by MOVPE. Almost all large screens in stadiums, advertising hoardings, concert, and entertainment lighting use high‐brightness LEDs made by MOVPE. High‐power laser welding used in the automotive, aerospace, and other industrial sectors use materials made by MOVPE. 3D sensing now appearing on mobile handsets, gesture recognition in cars, and LiDaR (Light Detection and Ranging, the fundamental sensing technology for autonomous drive vehicles) all rely on MOVPE.
Looking forward, MOVPE will be used for many more applications and is now poised to enable the increasingly rapid adoption of compound semiconductors within the overall semiconductor industry. This is a $400 billion business spanning the entire globe and providing almost half of all global GDP growth directly and through its impact on information and communications technology (ICT). In other words, MOVPE is an absolutely core enabling technology for future global growth.
The MOVPE industry is growing rapidly but continues to require significant numbers of engineers, scientists, physicists, chemists, chemical engineers, operators, managers, and leaders. They all need to be well informed, well trained, knowledgeable, and inspired and motivated to help further develop the technology. By doing so, they will play a significant role, not only in bringing more efficient, more powerful, higher‐speed, lower‐cost products to market, thus enhancing the way we live our lives, how we work, and how we spend our leisure time; but also contributing to the reduction of greenhouse‐gas emissions, to the benefit of our planet.
This book provides a comprehensive overview of MOVPE and should be used to train, inform, educate, and inspire this new generation of industrial and academic participants. I am proud to be associated with it, and I commend it wholeheartedly to the semiconductor community. No self‐respecting technology bookshelf should be without it.
This book series is devoted to the rapidly developing class of materials used for electronic and optoelectronic applications. It is designed to provide much‐needed information on the fundamental scientific principles of these materials, together with how these are employed in technological applications. The books are aimed at (postgraduate) students, researchers, and technologists, engaged in research, development, and the study of materials in electronics and photonics, and industrial scientists developing new materials, devices, and circuits for the electronic, optoelectronic and, communications industries.
The development of new electronic and optoelectronic materials depends not only on materials engineering at a practical level, but also on a clear understanding of the properties of materials, and the fundamental science behind these properties. It is the properties of a material that eventually determine its usefulness in an application. The series therefore also includes such titles as electrical conduction in solids, optical properties, thermal properties, and so on, all with applications and examples of materials in electronics and optoelectronics. The characterization of materials is also covered within the series in as much as it is impossible to develop new materials without the proper characterization of their structure and properties. Structure–property relationships have always been fundamentally and intrinsically important to materials science and engineering.
Materials science is well known for being one of the most interdisciplinary sciences. It is the interdisciplinary aspect of materials science that has led to many exciting discoveries, new materials and new applications. It is not unusual to find scientists with a chemical engineering background working on materials projects with applications in electronics. In selecting titles for the series, we have tried to maintain the interdisciplinary aspect of the field, and hence its excitement to researchers in this field.