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<p>PREFACE vii</p> <p>PHYSICAL CONSTANTS ix</p> <p>NOTATIONS xi</p> <p><b>CHAPTER 1. FROM MEMS TO NEMS 1</b></p> <p>1.1. Micro- and nanoelectromechanical systems: an overview 1</p> <p>1.2. Conclusion 9</p> <p><b>CHAPTER 2. TRANSDUCTION ON THE NANOMETRIC SCALE AND THE NOTION OF NOISE 13</b></p> <p>2.1. Mechanical transfer function 14</p> <p>2.2. Transduction principles 20</p> <p>2.2.1. The actuation of nanostructures 23</p> <p>2.2.2. Detection 31</p> <p>2.3. Self-oscillation and noises 49</p> <p>2.4. Conclusion 58</p> <p><b>CHAPTER 3. MONOLITHIC INTEGRATION OF NEMS WITH THEIR READOUT ELECTRONICS 61</b></p> <p>3.1. Foreword 61</p> <p>3.1.1. Why integrate NEMS with their readout electronics? 61</p> <p>3.1.2. What are the differences between MEMS-CMOS and NEMS-CMOS? 62</p> <p>3.2. The advantages of and main approaches to monolithic integration 64</p> <p>3.2.1. A comparison of integration schemes and their electrical performance 64</p> <p>3.2.2. Closed-loop NEMS-CMOS oscillators: the essential building block for NEMS-based frequency sensors 69</p> <p>3.2.3. Overview of the main achievements from the perspective of manufacturing technology 70</p> <p>3.3. Analysis of some significant achievements from the perspective of transduction 75</p> <p>3.3.1. Examples of capacitive NEMS-CMOS 75</p> <p>3.3.2. Examples of piezoresistive NEMS-CMOS 82</p> <p>3.3.3. Alternative approaches 85</p> <p>3.4. Conclusions and future perspectives 86</p> <p><b>CHAPTER 4. NEMS AND SCALING EFFECTS 89</b></p> <p>4.1. Introduction 89</p> <p>4.1.1. Intrinsic losses 96</p> <p>4.1.2. Extrinsic losses 97</p> <p>4.2. Near field effect in a nanostructure: Casimir force 102</p> <p>4.2.1. Intuitive explanation of the Casimir force 102</p> <p>4.2.2. The problem 105</p> <p>4.2.3. Rigorous calculation of the Casimir force between two silicon slabs 107</p> <p>4.2.4. Impact of the Casimir force in a nano-accelerometer 113</p> <p>4.2.5. Conclusion 117</p> <p>4.3. Example of “intrinsic” scaling effects: electrical conduction laws 117</p> <p>4.3.1. Electrical resistivity 117</p> <p>4.3.2. Piezoresistive effect 125</p> <p>4.4. Optomechanical nano-oscillators and quantum optomechanics 136</p> <p>4.5. Conclusion 147</p> <p><b>CHAPTER 5. CONCLUSION AND APPLICATION PROSPECTS: FROM FUNDAMENTAL PHYSICS TO APPLIED PHYSICS 149</b></p> <p>APPENDIX 167</p> <p>BIBLIOGRAPHY 175</p> <p>INDEX 193</p>

<p><strong>Laurent DURAFFOURG</strong> is Staff Scientist at the CEA/LETI-Minatec laboratories in Grenoble, France. <p><strong>Julien ARCAMONE</strong> is a Business Developer MEMS at CEA-LETI in Grenoble, France.

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