Details

<p>Preface xxiii</p> <p><b>1 The History of Vacuum Science and Vacuum Technology 1</b></p> <p>References 16</p> <p>Further Reading 17</p> <p><b>2 Applications and Scope of Vacuum Technology 19</b></p> <p>References 27</p> <p><b>3 Gas Laws and Kinetic Theory of Gases 29</b></p> <p>3.1 Description of the Gas State 29</p> <p>3.2 Kinetic Theory of Gases 38</p> <p>3.3 Transport Properties of Gases 50</p> <p>3.4 Real Gases 65</p> <p>3.5 Vapors 75</p> <p>References 81</p> <p>Comprehensive general treatments of the subject 82</p> <p><b>4 Gas Flow 83</b></p> <p>4.1 Types of Flows and Definitions 83</p> <p>4.2 Inviscid Viscous Flow and Gas Dynamics 93</p> <p>4.3 Frictional–Viscous Flow through a Tube 114</p> <p>4.4 Molecular Flow under High-Vacuum and Ultrahigh-Vacuum Conditions 131</p> <p>4.5 Flow throughout the Entire Pressure Range 151</p> <p>4.6 Flow with Temperature Difference, Thermal Effusion, and Transpiration 158</p> <p>4.7 Measuring Flow Conductances 162</p> <p>References 166</p> <p>Further Reading 166</p> <p><b>5 Analytical and Numerical Calculations of Rarefied Gas Flows 167</b></p> <p>5.1 Main Concepts 167</p> <p>5.2 Methods of Calculations of Gas Flows 178</p> <p>5.3 Velocity Slip and Temperature Jump Phenomena 181</p> <p>5.4 Momentum and Heat Transfer Through Rarefied Gases 185</p> <p>5.5 Flows Through Long Pipes 199</p> <p>5.6 Flow Through an Orifice 218</p> <p>5.7 Modeling of Holweck Pump 221</p> <p>5.8 Appendix A 223</p> <p>References 225</p> <p><b>6 Sorption and Diffusion 229</b></p> <p>6.1 Sorption Phenomena and the Consequences, Definitions, and Terminology 229</p> <p>6.2 Adsorption and Desorption Kinetics 234</p> <p>6.3 Absorption, Diffusion, and Outgassing 247</p> <p>6.4 Permeation 254</p> <p>References 256</p> <p>Further Reading 256</p> <p><b>7 Positive Displacement Pumps 259</b></p> <p>7.1 Introduction and Overview 259</p> <p>7.2 Oscillating Positive Displacement Pumps 262</p> <p>7.3 Single-Shaft Rotating Positive Displacement Pumps 276</p> <p>7.4 Twin-Spool Rotating Positive Displacement Pumps 305</p> <p>7.5 Specific Properties of Oil-Sealed Positive Displacement Pumps 331</p> <p>7.6 Basics of Positive Displacement Pumps 337</p> <p>7.7 Operating and Safety Recommendations 345</p> <p>7.8 Specific Accessories for Positive Displacement Pumps 350</p> <p>References 356</p> <p>Further Reading on Positive Displacement Pumps 359</p> <p><b>8 Condensers 361</b></p> <p>8.1 Condensation Processes Under Vacuum 361</p> <p>8.2 Condenser Designs 370</p> <p>8.3 Integrating Condensers into Vacuum Systems 376</p> <p>8.4 Calculation Examples 380</p> <p>References 382</p> <p><b>9 Jet and Diffusion Pumps 383</b></p> <p>9.1 Introduction and Overview 383</p> <p>9.2 Liquid Jet Vacuum Pumps 385</p> <p>9.3 Steam Jet Vacuum Pumps 387</p> <p>9.4 Diffusion Pumps 396</p> <p>9.5 Diffusion Pumps Versus Vapor Jet Pumps 415</p> <p>References 417</p> <p><b>10 Molecular and Turbomolecular Pumps 419</b></p> <p>10.1 Introduction 419</p> <p>10.2 Molecular Pumps 421</p> <p>10.3 Molecular and Regenerative Drag Pump Combination 427</p> <p>10.4 Physical Fundamentals of Turbomolecular Pump Stages 430</p> <p>10.5 Turbomolecular Pumps 439</p> <p>10.6 Performance Characteristics of Turbomolecular Pumps 450</p> <p>10.7 Operation and Maintenance of Turbomolecular Pumps 455</p> <p>10.8 Applications 457</p> <p>References 460</p> <p><b>11 Sorption Pumps 463</b></p> <p>11.1 Introduction 463</p> <p>11.2 Adsorption Pumps 464</p> <p>11.3 Getter 472</p> <p>11.4 Ion Getter Pumps 493</p> <p>11.5 Orbitron Pumps 507</p> <p>References 508</p> <p>Further Reading 509</p> <p><b>12 Cryotechnology and Cryopumps 511</b></p> <p>12.1 Introduction 511</p> <p>12.2 Methods of Refrigeration 512</p> <p>12.3 Working Principles of Cryopumps 520</p> <p>12.4 Design of Cryopumps 531</p> <p>12.5 Characteristics of a Cryopump 547</p> <p>12.6 Application Examples 555</p> <p>References 562</p> <p><b>13 Total Pressure Vacuum Gauges 565</b></p> <p>13.1 Introduction 565</p> <p>13.2 Mechanical Vacuum Gauges 566</p> <p>13.3 Spinning Rotor Gauges (Gas-Friction Vacuum Gauges) 584</p> <p>13.4 Direct Electric Pressure Measuring Transducers 593</p> <p>13.5 Thermal Conductivity Vacuum Gauges 594</p> <p>13.6 Thermal Mass Flowmeters 604</p> <p>13.7 Ionization Gauges 607</p> <p>13.8 Combined Vacuum Gauges 637</p> <p>References 639</p> <p><b>14 Partial Pressure Vacuum Gauges and Leak Detectors 643</b></p> <p>14.1 Introduction 643</p> <p>14.2 Partial Pressure Analysis by Mass Spectrometry 643</p> <p>14.3 Partial Pressure Measurement Using Optical Methods 672</p> <p>14.4 Leak Detectors 675</p> <p>References 692</p> <p><b>15 Calibrations and Standards 697</b></p> <p>15.1 Introduction 697</p> <p>15.2 Calibration of Vacuum Gauges 700</p> <p>15.3 Calibrations of Residual Gas Analyzers 733</p> <p>15.4 Calibration of Test Leaks 735</p> <p>15.5 Standards for Determining Characteristics of Vacuum Pumps 738</p> <p>References 742</p> <p><b>16 Materials 747</b></p> <p>16.1 Requirements and Overview of Materials 747</p> <p>16.2 Materials for Vacuum Technology 749</p> <p>16.3 Gas Permeability and Gas Emissions of Materials 763</p> <p>References 774</p> <p>Further Reading 775</p> <p><b>17 Vacuum Components, Seals, and Joints 777</b></p> <p>17.1 Introduction 777</p> <p>17.2 Vacuum Hygiene 778</p> <p>17.3 Joining Technologies in Vacuum Technology 781</p> <p>17.4 Components 806</p> <p>Abbreviations 839</p> <p>References 840</p> <p><b>18 Operating Vacuum Systems 843</b></p> <p>18.1 Electronic Integration of Vacuum Systems 843</p> <p>18.2 Calculation of Vacuum Systems 851</p> <p>18.3 Pressure Control 859</p> <p>18.4 Techniques for Operating Low-Vacuum Systems 860</p> <p>18.5 Techniques for Operating Fine-Vacuum Systems 870</p> <p>18.6 Techniques for Operating High-Vacuum Systems 879</p> <p>18.7 Techniques for Operating Ultrahigh-Vacuum Systems 892</p> <p>References 904</p> <p><b>19 Methods of Leak Detection 907</b></p> <p>19.1 Overview 907</p> <p>19.2 Properties of Leaks 912</p> <p>19.3 Overview of Leak-Detection Methods (See Also DIN EN 1779) 918</p> <p>19.4 Leak Detection Using Helium Leak Detectors 925</p> <p>19.5 Leak Detection with Other Tracer Gases 936</p> <p>19.6 Industrial Tightness Testing of Mass-Production Components 937</p> <p>References 942</p> <p>Further Reading 942</p> <p>Appendix 943</p> <p>Index 1003</p> <p>Directory of Products and Suppliers 1023</p>

Karl Jousten is head of the section Vacuum Metrology at the Physikalisch-Technische Bundesanstalt (PTB), the German National Institute for Metrology. He obtained his masters and Ph.D. degree in physics from the University of Heidelberg. After working as a post-doc at the Max-Planck-Institute for Nuclear Physics in Heidelberg, at the Oregon Graduate Institute of Science and Technology in the United States, and finally at the Fritz-Haber-Institute in Berlin, he joined the vacuum group at PTB in Berlin in 1990 that he leads since 1992. He has authored many scientific articles in the field as well as contributions to textbooks and edits the German edition of this book, "Wutz Handbuch Vakuumtechnik". He is active in the field of national (DIN) and international (ISO) standardization in vacuum technology. From 2005 to 2008, Karl Jousten has served as President of the German Vacuum Society. Since 2005 he chairs the international working group for low and very low pressures of the respective committee (CCM) of the Meter Convention.

DE