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PREFACE <br> <br> FABRICATION TECHNOLOGY <br> <br> MATERIAL CHARACTERIZATION <br> <br> MONOLITHICALLY INTEGRATED INERTIAL SENSORS <br> <br> CMOS?MEMS ACOUSTIC DEVICES <br> <br> RF CMOS MEMS <br> <br> CMOS-BASED PRESSURE SENSORS <br> <br> CMOS-BASED CHEMICAL SENSORS <br> <br> BIOMETRIC CAPACITIVE CMOS FINGERPRINT SENSOR SYSTEMS <br> <br> CMOS-BASED BIOCHEMICAL SENSING SYSTEMS <br> <br> CMOS-BASED THERMAL SENSORS <br> <br> CIRCUIT AND SYSTEM INTEGRATION <br> <br> SUBJECT INDEX <br>

"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies."<br> Advanced Materials<br> <br> "... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..."<br> MRS Bulletin<br>

<b>Oliver Brand</b> is Professor of Bioengineering and Microelectronics/Microsystems at Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990, and his PhD from ETH Zurich, Switzerland, in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002). Oliver Brand's research interest is in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging.<br /><br /><b>Gary K. Fedder</b> is Professor of Electrical and Computer Engineering, Professor of The Robotics Institute and the Director of the Institute for Complex Engineered Systems (ICES) at Carnegie Mellon University, Pittsburgh, USA. He received the BSc and MSc degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his PhD in 1994 from the University of California, Berkeley. His research interests include microelectromechanical systems (MEMS) modeling, simulation and synthesis, integration of MEMS and CMOS, microsensor design, microactuator control systems, and probe-based nanofabrication technologies.

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of<br> MEMS is covered from all angles.<br> <br> The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first<br> place, rather than having a hybrid solution.

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