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The Editor
Prof. Oliver Brand
School Electrical/Comp.Eng.
Georgia Inst. of Technology
777 Atlantic Drive
Atlanta, GA
United States
Prof. Isabelle Dufour
Université de Bordeaux
Laboratoire IMS
Bâtiment CBP
16 av. Pey Berland
33607 Pessac cedex
France
Prof. Stephen M. Heinrich
Marquette University
Civil, Construction and Environmental Engineering
Haggerty Hall 265
Milwaukee, WI
United States
Prof. Fabien Josse
Marquette University
Electrical & Computer Eng.
Haggerty Hall 294
Milwaukee, WI
United States
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Print ISBN: 978-3-527-33545-9
ePDF ISBN: 978-3-527-67636-1
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You hold in your hands the eleventh volume of our book series Advanced Micro & Nanosystems, dedicated to the field of Resonant MEMS. We have been very fortunate to enlist Prof. Oliver Brand, Prof. Isabelle Dufour, Prof. Stephen Heinrich, and Prof. Fabien Josse as Volume Editors. All four have extensive expertise in different aspects of Resonant MEMS and, as a team, actually have collaborated in recent years, resulting in a number of joint research publications. In a similar way, this book project turned out to be a true team project, from establishing the desired table of contents; to selecting an international team of experts as chapter authors; to assembling, editing, and fine-tuning the contents.
You might ask, why a book on Resonant MEMS? Clearly, resonant devices fabricated using MEMS (MicroElectroMechanical Systems) technologies are not new; in fact, one of the early MEMS devices is the Resonant Gate Transistor, published by Harvey C. Nathanson and co-workers in the IEEE Transactions on Electron Devices in 1967. Over the years, a resonant sensor version of just about every sensor imaginable has been investigated. In general, Resonant MEMS (and in particular resonant sensors) promise very high sensitivities, but often come at the expense of a more complicated device design and fabrication. In recent years, modern numerical modeling tools, in particular finite element modeling (FEM) software, and a number of fundamental theoretical studies have helped design better Resonant MEMS, and, as a result, first commercial devices based on Resonant MEMS have been developed. The best example might be the success of MEMS-based resonant gyroscopes in consumer electronic devices, such as smart phones and gaming consoles. As the field matures, we found a book that summarizes all aspects of Resonant MEMS, ranging from the Fundamentals to Implementation and Application, to be very timely. You have the result in your hands, and we hope that you enjoy reading this book as much as we do.
This book would not have been possible without a significant time commitment by the volume editors as well as the chapter authors. We want to thank them most heartily for their effort! Our thanks also go to the Wiley staff for their strong support of this project. The final printed result once again speaks for itself!
Oliver Brand, Gary K. Fedder,
Christofer Hierold, Jan G. Korvink,
Osamu Tabata, Series Editors
Atlanta, Pittsburgh,
Zurich, Freiburg,
Kyoto, January 2015
As the editing team for Vol. 11 of the Advanced Micro & Nanosystems series, entitled Resonant MEMS: Fundamentals, Implementation and Application, we hope that you benefit from this significant collaborative effort among the experts who have kindly contributed to this project. The book's raison d'être is to elucidate the various aspects of MEMS resonators, to identify the state of the art in this rapidly changing field, and to serve as a valuable reference tool to the readership, including serving as a springboard for future advances in this discipline.
Given the breadth of the resonant MEMS field, we have elected to group the various chapters of this volume into three parts as indicated by the book's subtitle. Part I, Fundamentals, comprises five chapters, each of which focuses on the theoretical description of the underlying physical phenomena that are relevant to virtually all resonant MEMS devices. This part includes detailed treatments on the fundamental theory of mechanical resonance; the effects of viscous fluids (a surrounding gas or liquid) on vibrating microcantilevers; a broad-based examination of various sources of damping (energy dissipation mechanisms); resonant response caused by parametric excitation, i.e., variations in resonator properties as opposed to direct (e.g., force) excitation; and an overview of the fundamentals of the finite element method with specific applications to MEMS resonators. Having laid the fundamental groundwork in Part I, the eight chapters of Part II, Implementation, examine how the fundamentals are applied in a practical setting to yield specific types of resonant MEMS devices and how these devices are designed to reliably perform a specific function. In particular, this group of chapters includes detailed discussions of resonant MEMS devices on the basis of the following materials and device designs: capacitive transducers, piezoelectric materials, nanoelectromechanical systems (NEMS), and organic materials (polymers). Also included in Part II are chapters treating the following practical implementation topics: electrothermal excitation methods; the use of embedded channels to overcome challenges posed by liquid-phase applications; hermetic packaging to protect the resonator and to ensure its long-term stability and reliability; and the development of compensation, tuning, and trimming techniques for the realization of high-precision resonators by accounting for variations in material properties, fabrication processes, and environmental operating conditions. Finally, in Part III, Application, we have included chapters that are dedicated to particular functionalities. Part III comprises four chapters on resonant MEMS for sensing applications, including the following: inertial sensing (motion detection); chemical detection in both gaseous and liquid environments; biochemical sensing for label-free, quantitative measurement of biomolecules such as proteins and nucleic acids, or even entire cells and viruses; and resonant MEMS-based rheometers for measuring the physical properties of fluids. The final chapter of Part III focuses on energy harvesting applications for converting ambient mechanical vibrations into useful electrical energy.
Finally, we would like to extend a sincere expression of gratitude to all of the chapter authors and their associated institutions, to the editorial staff at Wiley-VCH, especially Martin Preuss and Martin Graf-Utzmann, and to Sangeetha Suresh and the production staff at Laserwords. Without the tireless efforts of all of these people, this book would not have been possible. Also, all four co-editors gratefully acknowledge the financial support of CNRS (France, Projet PICS, 2012–2014) for the international collaboration required to plan and realize this volume, while three of the co-editors (Brand, Heinrich, Josse) gratefully acknowledge research funding from the National Science Foundation (U.S.) over the period 2008–present. The support provided by both of these funding agencies was instrumental in bringing this book to fruition.
Oliver Brand
Isabelle Dufour
Stephen M. Heinrich
Fabien Josse
Co-Editors
Atlanta, Pessac,
Milwaukee, January 2015
Oliver Brand, PhD Oliver Brand received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990 and his PhD degree from ETH Zurich, Switzerland, in 1994. From 1995 to 1997, he worked as a postdoctoral fellow at Georgia Tech. From 1997 to 2002, he was a lecturer at ETH Zurich and deputy director of the Physical Electronics Laboratory. In 2003, he joined the Electrical and Computer Engineering faculty at the Georgia Institute of Technology where he is currently a Professor. Since 2014, he serves as the Executive Director of Georgia Tech's Institute for Electronics and Nanotechnology. He has co-authored more than 190 publications in scientific journals and conference proceedings. He is a co-editor of the Wiley-VCH book series Advanced Micro & Nanosystems , a member of the editorial board of Sensors and Materials, and has served as General Co-Chair of the 2008 IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008). Dr. Brand is a senior member of the IEEE and a co-recipient of the 2005 IEEE Donald G. Fink Prize Paper Award. His research interests are in the areas of silicon-based microsystems, microsensors, MEMS fabrication technologies, and microsystem packaging.
Isabelle Dufour, PhD Isabelle Dufour graduated from Ecole Normale Supérieure de Cachan in 1990 and received her PhD and HDR degrees in engineering science from the University of Paris-Sud, Orsay, France, in 1993 and 2000, respectively. She was a CNRS research fellow from 1994 to 2007, first in Cachan working on the modeling of electrostatic actuators (micromotors, micropumps) and then after 2000 in Bordeaux working on microcantilever-based chemical sensors. She is currently a Professor of electrical engineering at the University of Bordeaux, and her research interests are in the areas of microcantilever-based sensors for chemical detection, rheological measurements, material characterization, and energy harvesting.
Stephen M. Heinrich, PhD Stephen M. Heinrich earned the BS degree summa cum laude from Penn State in 1980 and the MS and PhD degrees from the University of Illinois at Urbana-Champaign in 1982 and 1985, all in civil engineering. Hired as an Assistant Professor at Marquette University in 1985, he was promoted to his current rank of Professor in 1998. In 2000, Prof. Heinrich was awarded the Rev. John P. Raynor Faculty Award for Teaching Excellence, Marquette's highest teaching honor, while in 2006 he was a awarded a Fulbright Research Scholar Award to support research collaboration at the Université de Bordeaux. Dr. Heinrich's research has focused on structural mechanics applications in microelectronics packaging and analytical modeling of cantilever-based chemical/biosensors and, more recently, MEMS energy harvesters. The investigations performed by Dr. Heinrich and his colleagues have resulted in more than 100 refereed publications and three best paper awards from IEEE and ASME. His professional service activities include membership on the ASCE Elasticity Committee, Associate Editor positions for the IEEE Transactions on Advanced Packaging and the ASME Journal of Electronic Packaging, and technical review activities for more than 40 journals, publishers, and funding agencies.
Fabien Josse, PhD Fabien Josse received the MS and PhD degrees in Electrical Engineering from the University of Maine in 1979 and 1982, respectively. He has been with Marquette University, Milwaukee, WI, since 1982 and is currently Professor of Electrical, Computer and Biomedical Engineering. He is also an Adjunct Professor with the Department of Electrical Engineering, Laboratory for Surface Science and Technology, University of Maine. He has been a Visiting Professor with the University of Heidelberg, Germany, the Laboratoire IMS, University of Bordeaux, France, and the Physical Electronics Laboratory, ETH Zurich, Switzerland, and IMTEK, University of Freiburg, Germany. His research interests include solid state sensors, acoustic wave sensors, and MEMS devices for liquid-phase biochemical sensor applications, investigation of novel sensor platforms, and smart sensor systems. Prof. Josse is a senior member of IEEE and associate editor (2002–2009) of the IEEE Sensors Journal.
Gabriel Abadal
Universitat AutonÒma de Barcelona (UAB)
Escola d'Enginyeria
Department d'Enginyeria ElectrÒnica
Campus UAB 08193
Bellaterra
Spain
Reza Abdolvand
University of Central Florida
Department of Electrical Engineering and Computer Sciences
4000 Central Florida Blvd.
Building 116 – Room 346
Orlando, FL 32816-2362
USA
Vaida Auzelyte
Microsystem Laboratory
Ecole Polytechnique Federal de Lausanne (EPFL)
EPFL STI IMT IMT-LS-GE
BM 3107 (Batiment BM)
Station 17, 1015 Lausanne
Switzerland
Farrokh Ayazi
Georgia Institute of Technology
School of Electrical and Computer Engineering
777 Atlantic Drive
Atlanta, GA 30332-0250
USA
and
Qualtré Inc
225 Cedar Hill St
Marlborough, MA 01752
USA
N. Barniol
Universitat AutonÒma de Barcelona (UAB)
Escola d'Enginyeria
Department d'Enginyeria ElectrÒnica
Campus UAB 08193
Bellaterra
Spain
Luke A. Beardslee
SUNY College of Nanoscale Science and Engineering
546 Mercer Street
Albany, NY 12208
USA
Stephen P. Beeby
Department of Electronics and Computer Science
University of Southampton Highfield
SO17 1BJ
Southampton
UK
Oliver Brand
Georgia Institute of Technology
School of Electrical and Computer Engineering
777 Atlantic Drive
Atlanta, GA 30332-0250
USA
Jürgen Brugger
Microsystem Laboratory
Ecole Polytechnique Federal de Lausanne (EPFL)
EPFL STI IMT IMT-LS-GE
BM 3107 (Batiment BM)
Station 17, 1015 Lausanne
Switzerland
Thomas P. Burg
Max Planck Institute for Biophysical Chemistry
Am Fassberg 11
37077 Göttingen
Germany
Isabelle Dufour
Université de Bordeaux
Laboratoire IMS
Bâtiment CBP
16 av. Pey Berland
33607 Pessac cedex
France
Cornelis Anthony van Eysden
KTH Royal Institute of Technology and Stockholm University
NORDITA
Roslagstullsbacken 23
10691 Stockholm
Sweden
Gary K. Fedder
Carnegie Mellon University
The Robotics Institute
Department of Electrical and Computer Engineering
5000 Forbes Avenue
Pittsburgh, PA 15213-3890
USA
Shirin Ghaffari
Stanford University
Mechanical Engineering Department
Building 530
440 Escondido Mall
Stanford, CA 94305-3030
USA
Jonathan Gonzales
Oklahoma State University
Department of Electrical and Computer Engineering
700 North Greenwood Ave.
Tulsa, OK 74106-0702
USA
Andrew Bradley Graham
Stanford University
Department of Mechanical Engineering
Building 530
440 Escondido Mall
Stanford, CA 94305-3030
USA
Congzhong Guo
Carnegie Mellon University
Department of Electrical and Computer Engineering
5000 Forbes Avenue
Pittsburgh, PA 15213-3890
USA
Martin Heinisch
Johannes Kepler University Linz
Institute for Microelectronics and Microsensors
Altenbergerstraß 69
4040 Linz
Austria
Stephen M. Heinrich
Marquette University
Department of Civil, Construction
and Environmental Engineering
265 Haggerty Hall
P.O. Box 1881
Milwaukee, WI 53201-1881
USA
Gavin Ho
NanoFab Corporation
800 West El Camino Real
Suite 180
Mountain View, CA 94040-2586
USA
Bernhard Jakoby
Johannes Kepler University Linz
Institute for Microelectronics and Microsensors
Altenbergerstraße 69
4040 Linz
Austria
Blake N. Johnson
Drexel University
Department of Chemical and Biological Engineering
3141 Chestnut Street
Philadelphia, PA 19104
USA
Fabien Josse
Marquette University
Department of Electrical and Computer Engineering
294 Haggerty Hall
P.O. Box 1881
Milwaukee, WI 53201-1881
USA
Thomas William Kenny
Stanford University
Department of Mechanical Engineering
Building 530
440 Escondido Mall
Stanford, CA 94305-3030
USA
Matthew William Messana
Stanford University
Department of Mechanical Engineering
Building 530
440 Escondido Mall
Stanford, CA 94305-3030
USA
Raj Mutharasan
Drexel University
Department of Chemical and Biological Engineering
3141 Chestnut Street
Philadelphia, PA 19104
USA
Liviu Nicu
LAAS-CNRS
7 avenue du Colonel Roche
31077 Toulouse
France
Francesc Perez-Murano
Institut de MicroelectrÒnica de Barcelona (IMB-CNM CSIC)
Campus de la UAB
08193 Bellaterra
Spain
Gianluca Piazza
Carnegie Mellon University
Department of Electrical and Computer Engineering
Roberts Engineering Hall
Room 333, 5000 Forbes Avenue
Pittsburgh, PA 15213
USA
Siavash Pourkamali
The University of Texas at Dallas
Department of Electrical Engineering
800 W. Campbell Road
Richardson, TX 75080
USA
Erwin K. Reichel
Johannes Kepler University Linz
Institute for Microelectronics and Microsensors
Altenbergerstraß 69
4040 Linz
Austria
Jeffrey F. Rhoads
Purdue University
School of Mechanical Engineering
Birck Nanotechnology Center
Ray W. Herrick Laboratories
585 Purdue Mall
West Lafayette, IN 47907-2088
USA
John Elie Sader
The University of Melbourne
Department of Mathematics and Statistics
3010 Victoria
Australia
Veronica Savu
Microsystem Laboratory
Ecole Polytechnique Federal de Lausanne (EPFL)
EPFL STI IMT IMT-LS-GE
BM 3107 (Batiment BM)
Station 17, 1015 Lausanne
Switzerland
Silvan Schmid
Technical University of Denmark
DTU Nanotech
Department of Micro- and Nanotechnology
Ørsteds Plads
Building 345Ø
Room 158
2800 Kgs. Lyngby
Denmark
Diego Emilio Serrano
Georgia Institute of Technology
School of Electrical and Computer Engineering
777 Atlantic Drive
Atlanta, GA 30332-0250
USA
and
Qualtré Inc
225 Cedar Hill St
Marlborough, MA 01752
USA
Roozbeh Tabrizian
Georgia Institute of Technology
School of Electrical and Computer Engineering
777 Atlantic Drive
Atlanta, GA 30332-0250
USA
Herre S. J. van der Zant
Delft University of Technology
Kavli Institute of Nanoscience
Lorentzweg 1
2628 CJ Delft
The Netherlands
Warner J. Venstra
Delft University of Technology
Kavli Institute of Nanoscience
Lorentzweg 1
2628 CJ Delft
The Netherlands
Luis Guillermo Villanueva
California Institute of Technology
1200 E California Blvd.
MC 149-33
Pasadena, CA
USA