Table of Contents
Cover
Title Page
Copyright
Oxide Films and Conduction AFM
References
List of Contributors
Chapter 1: History and Status of the CAFM
1.1 The Atomic Force Microscope
1.2 The Conductive Atomic Force Microscope
1.3 History and Status of the CAFM
1.4 Editor's Choice: On the Use of CAFM to Study Nanogenerators Based on Nanowires
1.5 Conclusions
References
Chapter 2: Fabrication and Reliability of Conductive AFM Probes
2.1 Introduction
2.2 Manufacturing of Conductive AFM Probes
2.3 How to Choose Your C-AFM Tip
2.4 Tip Wear and Sample Damage: Applicable Forces and Currents in C-AFM
2.5 Conclusions
References
Chapter 3: Fundamentals of CAFM Operation Modes
3.1 Introduction
3.2 Tip-Sample Interaction: Contact Area, Effective Emission Area, and Conduction Mechanisms
3.3 Work Function Difference and Offset Voltage
3.4 Operation Modes
3.5 Case Studies
3.6 Conclusion and Future Perspectives
Acknowledgment
References
Chapter 4: Investigation of High-k Dielectric Stacks by C-AFM: Advantages, Limitations, and Possible Applications
4.1 Introduction
4.2 Comparison Between Macroscopic
I–V
Measurements and C-AFM
4.3 Influence of Displacement Currents on the Sensitivity of C-AFM Measurements
4.4 Applications of C-AFM
4.5 Conclusion
References
Chapter 5: Characterization of Grain Boundaries in Polycrystalline HfO2 Dielectrics
5.1 Introduction
5.2 Experimental Details and Sample Specifications
5.3 Formation of Grain Boundaries and Its Local Electrical Properties in HfO
2
Dielectric
5.4 RVS and CVS Stressing of HfO
2
/SiO
x
Dielectric Stack
5.5 Uniform Stressing with Successive Scanning in CAFM Mode
5.6 Conclusions
References
Chapter 6: CAFM Studies on Individual GeSi Quantum Dots and Quantum Rings
6.1 Introduction
6.2 Conductive Properties of Individual GeSi QDs and QRs
6.3 Modulating the Conductive Properties of GeSi QDs
6.4 Simultaneous Measurements of Composition and Current Distributions of GeSi QRs
6.5 Conclusions
References
Chapter 7: Conductive Atomic Force Microscopy of Two-Dimensional Electron Systems: From AlGaN/GaN Heterostructures to Graphene and MoS2
7.1 Introduction
7.2 Nanoscale Electrical Characterization of AlGaN/GaN Heterostructures
7.3 CAFM Characterization of Graphene and MoS
2
7.4 Conclusions
Acknowledgments
References
Chapter 8: Nanoscale Three-Dimensional Characterization with Scalpel SPM
8.1 Introduction
8.2 SPM Metrology with Depth Information
8.3 Scalpel SPM: A Tip-Based Slice-and-View Methodology
8.4 Applications
8.5 Conclusions and Outlook
References
Chapter 9: Conductive Atomic Force Microscopy for Nanolithography Based on Local Anodic Oxidation
9.1 Introduction to AFM Nanolithography
9.2 Local Anodic Oxidation
9.3 Kinetics of LAO
9.4 Measurement of Electrical Current During LAO
9.5 Conclusions
Acknowledgments
References
Chapter 10: Combination of Semiconductor Parameter Analyzer and Conductive Atomic Force Microscope for Advanced Nanoelectronic Characterization
10.1 Introduction
10.2 Combination of SPA and CAFM for Local Channel Hot Carrier Degradation Analysis
10.3 Combination of CAFM and SPA for Resistive Switching Analyses
10.4 Conclusions
References
Chapter 11: Design and Fabrication of a Logarithmic Amplifier for Scanning Probe Microscopes to Allow Wide-Range Current Measurements
11.1 Introduction
11.2 Fabrication of a Logarithmic Preamplifier for CAFMS
11.3 Conclusions
References
Chapter 12: Enhanced Current Dynamic Range Using ResiScope™ and Soft-ResiScope™ AFM Modes
12.1 Introduction
12.2 Conductive AFM
12.3 ResiScope™ Mode
12.4 Soft-ResiScope™ Mode
12.5 Conclusions
References
Chapter 13: Multiprobe Electrical Measurements without Optical Interference
13.1 Introduction
13.2 The Multiprobe Platform: Design and Key Features
13.3 The Present and the Future
13.4 Conclusions
References
Chapter 14: KPFM and its Use to Characterize the CPD in Different Materials
14.1 Introduction
14.2 Kelvin Probe Force Microscopy
14.3 Applications of KPFM
14.4 Conclusion and Outlook
Acknowledgment
References
Chapter 15: Hot Electron Nanoscopy and Spectroscopy (HENs)
15.1 Introduction
15.2 Coupling Schemes
15.3 Plasmonic Device and Optical Characterization
15.4 Theoretical Section
15.5 HENs Measurements: Plasmon-Assisted Current Maps and Ultimate Spatial Resolution
15.6 Kelvin Probe, HENs, and Electrical Techniques
15.7 Fast Pulses in Adiabatic Compression for Hot Electron Generation
15.8 Conclusion
Acknowledgments
References
Index
End User License Agreement
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